JPS6426362U - - Google Patents
Info
- Publication number
- JPS6426362U JPS6426362U JP11971187U JP11971187U JPS6426362U JP S6426362 U JPS6426362 U JP S6426362U JP 11971187 U JP11971187 U JP 11971187U JP 11971187 U JP11971187 U JP 11971187U JP S6426362 U JPS6426362 U JP S6426362U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- target
- moving means
- film
- shutter film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11971187U JPS6426362U (enExample) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11971187U JPS6426362U (enExample) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426362U true JPS6426362U (enExample) | 1989-02-14 |
Family
ID=31365179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11971187U Pending JPS6426362U (enExample) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426362U (enExample) |
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1987
- 1987-08-04 JP JP11971187U patent/JPS6426362U/ja active Pending