JPS6426362U - - Google Patents

Info

Publication number
JPS6426362U
JPS6426362U JP11971187U JP11971187U JPS6426362U JP S6426362 U JPS6426362 U JP S6426362U JP 11971187 U JP11971187 U JP 11971187U JP 11971187 U JP11971187 U JP 11971187U JP S6426362 U JPS6426362 U JP S6426362U
Authority
JP
Japan
Prior art keywords
shutter
target
moving means
film
shutter film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11971187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11971187U priority Critical patent/JPS6426362U/ja
Publication of JPS6426362U publication Critical patent/JPS6426362U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP11971187U 1987-08-04 1987-08-04 Pending JPS6426362U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11971187U JPS6426362U (enrdf_load_stackoverflow) 1987-08-04 1987-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11971187U JPS6426362U (enrdf_load_stackoverflow) 1987-08-04 1987-08-04

Publications (1)

Publication Number Publication Date
JPS6426362U true JPS6426362U (enrdf_load_stackoverflow) 1989-02-14

Family

ID=31365179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11971187U Pending JPS6426362U (enrdf_load_stackoverflow) 1987-08-04 1987-08-04

Country Status (1)

Country Link
JP (1) JPS6426362U (enrdf_load_stackoverflow)

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