JPS6426073A - Metallic diaphragm valve - Google Patents

Metallic diaphragm valve

Info

Publication number
JPS6426073A
JPS6426073A JP18132087A JP18132087A JPS6426073A JP S6426073 A JPS6426073 A JP S6426073A JP 18132087 A JP18132087 A JP 18132087A JP 18132087 A JP18132087 A JP 18132087A JP S6426073 A JPS6426073 A JP S6426073A
Authority
JP
Japan
Prior art keywords
diaphragm
cover
outer circumferential
metal
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18132087A
Other languages
English (en)
Other versions
JPH0674850B2 (ja
Inventor
Satoru Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP62181320A priority Critical patent/JPH0674850B2/ja
Publication of JPS6426073A publication Critical patent/JPS6426073A/ja
Publication of JPH0674850B2 publication Critical patent/JPH0674850B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP62181320A 1987-07-21 1987-07-21 金属ダイヤフラム弁 Expired - Lifetime JPH0674850B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62181320A JPH0674850B2 (ja) 1987-07-21 1987-07-21 金属ダイヤフラム弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62181320A JPH0674850B2 (ja) 1987-07-21 1987-07-21 金属ダイヤフラム弁

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4187943A Division JP2573775B2 (ja) 1992-07-15 1992-07-15 金属ダイヤフラム弁

Publications (2)

Publication Number Publication Date
JPS6426073A true JPS6426073A (en) 1989-01-27
JPH0674850B2 JPH0674850B2 (ja) 1994-09-21

Family

ID=16098618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62181320A Expired - Lifetime JPH0674850B2 (ja) 1987-07-21 1987-07-21 金属ダイヤフラム弁

Country Status (1)

Country Link
JP (1) JPH0674850B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348072A (ja) * 1989-06-21 1991-03-01 Benkan Corp メタル‐メタル接触形ダイヤフラム弁
US5112027A (en) * 1989-06-21 1992-05-12 Benkan Corporation Metal diaphragm valve
US5131627A (en) * 1990-10-17 1992-07-21 Nupro Company Diaphragm valve

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139628A (en) * 1976-05-19 1977-11-21 Hitachi Ltd Method of preventing hydrogen brittleness
JPS56167790U (ja) * 1980-05-15 1981-12-11
JPS56162284A (en) * 1980-05-15 1981-12-14 Tsuneo Aoki Fluid pumping machine
JPS61244976A (ja) * 1985-04-23 1986-10-31 Fujikin:Kk 流体遮断開放器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139628A (en) * 1976-05-19 1977-11-21 Hitachi Ltd Method of preventing hydrogen brittleness
JPS56167790U (ja) * 1980-05-15 1981-12-11
JPS56162284A (en) * 1980-05-15 1981-12-14 Tsuneo Aoki Fluid pumping machine
JPS61244976A (ja) * 1985-04-23 1986-10-31 Fujikin:Kk 流体遮断開放器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348072A (ja) * 1989-06-21 1991-03-01 Benkan Corp メタル‐メタル接触形ダイヤフラム弁
US5112027A (en) * 1989-06-21 1992-05-12 Benkan Corporation Metal diaphragm valve
US5131627A (en) * 1990-10-17 1992-07-21 Nupro Company Diaphragm valve

Also Published As

Publication number Publication date
JPH0674850B2 (ja) 1994-09-21

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