JPS6424829U - - Google Patents
Info
- Publication number
- JPS6424829U JPS6424829U JP11998387U JP11998387U JPS6424829U JP S6424829 U JPS6424829 U JP S6424829U JP 11998387 U JP11998387 U JP 11998387U JP 11998387 U JP11998387 U JP 11998387U JP S6424829 U JPS6424829 U JP S6424829U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- high frequency
- frequency power
- processing apparatus
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11998387U JPS6424829U (da) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11998387U JPS6424829U (da) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424829U true JPS6424829U (da) | 1989-02-10 |
Family
ID=31365687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11998387U Pending JPS6424829U (da) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424829U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006502529A (ja) * | 2001-12-19 | 2006-01-19 | アプライド マテリアルズ インコーポレイテッド | 半導体ワークピースを処理するためのプラズマリアクタ |
-
1987
- 1987-08-04 JP JP11998387U patent/JPS6424829U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006502529A (ja) * | 2001-12-19 | 2006-01-19 | アプライド マテリアルズ インコーポレイテッド | 半導体ワークピースを処理するためのプラズマリアクタ |