JPS642442U - - Google Patents

Info

Publication number
JPS642442U
JPS642442U JP9579787U JP9579787U JPS642442U JP S642442 U JPS642442 U JP S642442U JP 9579787 U JP9579787 U JP 9579787U JP 9579787 U JP9579787 U JP 9579787U JP S642442 U JPS642442 U JP S642442U
Authority
JP
Japan
Prior art keywords
cassette
robot
wafers
exhaust hole
moves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9579787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9579787U priority Critical patent/JPS642442U/ja
Publication of JPS642442U publication Critical patent/JPS642442U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP9579787U 1987-06-22 1987-06-22 Pending JPS642442U (US07968547-20110628-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9579787U JPS642442U (US07968547-20110628-C00004.png) 1987-06-22 1987-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9579787U JPS642442U (US07968547-20110628-C00004.png) 1987-06-22 1987-06-22

Publications (1)

Publication Number Publication Date
JPS642442U true JPS642442U (US07968547-20110628-C00004.png) 1989-01-09

Family

ID=31320515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9579787U Pending JPS642442U (US07968547-20110628-C00004.png) 1987-06-22 1987-06-22

Country Status (1)

Country Link
JP (1) JPS642442U (US07968547-20110628-C00004.png)

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