JPS6424415U - - Google Patents
Info
- Publication number
- JPS6424415U JPS6424415U JP11659687U JP11659687U JPS6424415U JP S6424415 U JPS6424415 U JP S6424415U JP 11659687 U JP11659687 U JP 11659687U JP 11659687 U JP11659687 U JP 11659687U JP S6424415 U JPS6424415 U JP S6424415U
- Authority
- JP
- Japan
- Prior art keywords
- frequency power
- value
- frequency
- power
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 230000010363 phase shift Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
- Control Of Electrical Variables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11659687U JPS6424415U (pt) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11659687U JPS6424415U (pt) | 1987-07-31 | 1987-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424415U true JPS6424415U (pt) | 1989-02-09 |
Family
ID=31359271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11659687U Pending JPS6424415U (pt) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424415U (pt) |
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1987
- 1987-07-31 JP JP11659687U patent/JPS6424415U/ja active Pending