JPS6424413A - Identification of wafer - Google Patents

Identification of wafer

Info

Publication number
JPS6424413A
JPS6424413A JP62180832A JP18083287A JPS6424413A JP S6424413 A JPS6424413 A JP S6424413A JP 62180832 A JP62180832 A JP 62180832A JP 18083287 A JP18083287 A JP 18083287A JP S6424413 A JPS6424413 A JP S6424413A
Authority
JP
Japan
Prior art keywords
quarrer
identification
reflection parts
code
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62180832A
Other languages
Japanese (ja)
Inventor
Wataru Karasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62180832A priority Critical patent/JPS6424413A/en
Publication of JPS6424413A publication Critical patent/JPS6424413A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54406—Marks applied to semiconductor devices or parts comprising alphanumeric information
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54493—Peripheral marks on wafers, e.g. orientation flats, notches, lot number

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To avoid creation of dust and facilitate both the identification by mechanical reading and the identification by visual inspection of an operator by a method wherein regular reflection parts which have mirror surfaces and irregular reflection parts which have rough surfaces are formed in a predetermined region on a wafer and a light beam is applied to those parts and the reflected light is measured. CONSTITUTION:An identification pattern 2 is formed in a predetermined region on a wafer 1 such as an edge part where an orientation flat 1a is formed. The pattern 2 is composed of, for instance, quarrer codes or the like. One quarrer code is composed of four square blocks. A number is stamped in the block. By using the respective blocks as regular reflection parts which have mirror surfaces or irregular reflection parts which have rough surfaces, one code can express numbers 0-15 or 0-16. A laser beam from a laser emitting apparatus is applied to the quarrer codes and the reflected light is measured by a photodetector 11 to read the number expressed by the quarrer code.
JP62180832A 1987-07-20 1987-07-20 Identification of wafer Pending JPS6424413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62180832A JPS6424413A (en) 1987-07-20 1987-07-20 Identification of wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62180832A JPS6424413A (en) 1987-07-20 1987-07-20 Identification of wafer

Publications (1)

Publication Number Publication Date
JPS6424413A true JPS6424413A (en) 1989-01-26

Family

ID=16090137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62180832A Pending JPS6424413A (en) 1987-07-20 1987-07-20 Identification of wafer

Country Status (1)

Country Link
JP (1) JPS6424413A (en)

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