JPS6423674U - - Google Patents
Info
- Publication number
- JPS6423674U JPS6423674U JP11790387U JP11790387U JPS6423674U JP S6423674 U JPS6423674 U JP S6423674U JP 11790387 U JP11790387 U JP 11790387U JP 11790387 U JP11790387 U JP 11790387U JP S6423674 U JPS6423674 U JP S6423674U
- Authority
- JP
- Japan
- Prior art keywords
- transport
- substrate
- stop position
- detection device
- absence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Controlling Sheets Or Webs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11790387U JPS6423674U (hr) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11790387U JPS6423674U (hr) | 1987-07-31 | 1987-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6423674U true JPS6423674U (hr) | 1989-02-08 |
Family
ID=31361772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11790387U Pending JPS6423674U (hr) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6423674U (hr) |
-
1987
- 1987-07-31 JP JP11790387U patent/JPS6423674U/ja active Pending