JPS642352U - - Google Patents

Info

Publication number
JPS642352U
JPS642352U JP9658487U JP9658487U JPS642352U JP S642352 U JPS642352 U JP S642352U JP 9658487 U JP9658487 U JP 9658487U JP 9658487 U JP9658487 U JP 9658487U JP S642352 U JPS642352 U JP S642352U
Authority
JP
Japan
Prior art keywords
electron gun
filament
field emission
group
emission type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9658487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9658487U priority Critical patent/JPS642352U/ja
Publication of JPS642352U publication Critical patent/JPS642352U/ja
Pending legal-status Critical Current

Links

JP9658487U 1987-06-25 1987-06-25 Pending JPS642352U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9658487U JPS642352U (US06826419-20041130-M00005.png) 1987-06-25 1987-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9658487U JPS642352U (US06826419-20041130-M00005.png) 1987-06-25 1987-06-25

Publications (1)

Publication Number Publication Date
JPS642352U true JPS642352U (US06826419-20041130-M00005.png) 1989-01-09

Family

ID=30962478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9658487U Pending JPS642352U (US06826419-20041130-M00005.png) 1987-06-25 1987-06-25

Country Status (1)

Country Link
JP (1) JPS642352U (US06826419-20041130-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023203755A1 (ja) * 2022-04-22 2023-10-26 株式会社日立ハイテク 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023203755A1 (ja) * 2022-04-22 2023-10-26 株式会社日立ハイテク 荷電粒子線装置

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