JPS6422036U - - Google Patents
Info
- Publication number
- JPS6422036U JPS6422036U JP11695987U JP11695987U JPS6422036U JP S6422036 U JPS6422036 U JP S6422036U JP 11695987 U JP11695987 U JP 11695987U JP 11695987 U JP11695987 U JP 11695987U JP S6422036 U JPS6422036 U JP S6422036U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stretching
- separating
- separating device
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000008188 pellet Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11695987U JPS6422036U (OSRAM) | 1987-07-30 | 1987-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11695987U JPS6422036U (OSRAM) | 1987-07-30 | 1987-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6422036U true JPS6422036U (OSRAM) | 1989-02-03 |
Family
ID=31359963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11695987U Pending JPS6422036U (OSRAM) | 1987-07-30 | 1987-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6422036U (OSRAM) |
-
1987
- 1987-07-30 JP JP11695987U patent/JPS6422036U/ja active Pending