JPS6421772U - - Google Patents

Info

Publication number
JPS6421772U
JPS6421772U JP11546587U JP11546587U JPS6421772U JP S6421772 U JPS6421772 U JP S6421772U JP 11546587 U JP11546587 U JP 11546587U JP 11546587 U JP11546587 U JP 11546587U JP S6421772 U JPS6421772 U JP S6421772U
Authority
JP
Japan
Prior art keywords
diaphragm
lid
piezoelectric element
enclosed
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11546587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11546587U priority Critical patent/JPS6421772U/ja
Publication of JPS6421772U publication Critical patent/JPS6421772U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP11546587U 1987-07-27 1987-07-27 Pending JPS6421772U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11546587U JPS6421772U (enrdf_load_stackoverflow) 1987-07-27 1987-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11546587U JPS6421772U (enrdf_load_stackoverflow) 1987-07-27 1987-07-27

Publications (1)

Publication Number Publication Date
JPS6421772U true JPS6421772U (enrdf_load_stackoverflow) 1989-02-03

Family

ID=31357147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11546587U Pending JPS6421772U (enrdf_load_stackoverflow) 1987-07-27 1987-07-27

Country Status (1)

Country Link
JP (1) JPS6421772U (enrdf_load_stackoverflow)

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