JPS6421772U - - Google Patents
Info
- Publication number
- JPS6421772U JPS6421772U JP11546587U JP11546587U JPS6421772U JP S6421772 U JPS6421772 U JP S6421772U JP 11546587 U JP11546587 U JP 11546587U JP 11546587 U JP11546587 U JP 11546587U JP S6421772 U JPS6421772 U JP S6421772U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- lid
- piezoelectric element
- enclosed
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11546587U JPS6421772U (cs) | 1987-07-27 | 1987-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11546587U JPS6421772U (cs) | 1987-07-27 | 1987-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6421772U true JPS6421772U (cs) | 1989-02-03 |
Family
ID=31357147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11546587U Pending JPS6421772U (cs) | 1987-07-27 | 1987-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6421772U (cs) |
-
1987
- 1987-07-27 JP JP11546587U patent/JPS6421772U/ja active Pending