JPS6421379U - - Google Patents

Info

Publication number

JPS6421379U

JPS6421379U JP11450287U JP11450287U JPS6421379U JP S6421379 U JPS6421379 U JP S6421379U JP 11450287 U JP11450287 U JP 11450287U JP 11450287 U JP11450287 U JP 11450287U JP S6421379 U JPS6421379 U JP S6421379U

Authority

JP

Japan

Prior art keywords

stand

imphal

supported

wafer

integrated circuit

Prior art date

1987-07-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000010438 heat treatment Methods 0.000 claims 1
• 239000000523 sample Substances 0.000 description 4
• 238000010586 diagram Methods 0.000 description 3
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1