JPS6421345U - - Google Patents

Info

Publication number
JPS6421345U
JPS6421345U JP11613987U JP11613987U JPS6421345U JP S6421345 U JPS6421345 U JP S6421345U JP 11613987 U JP11613987 U JP 11613987U JP 11613987 U JP11613987 U JP 11613987U JP S6421345 U JPS6421345 U JP S6421345U
Authority
JP
Japan
Prior art keywords
semiconductor
diaphragm
pressure sensor
gauges
piezoresistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11613987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11613987U priority Critical patent/JPS6421345U/ja
Publication of JPS6421345U publication Critical patent/JPS6421345U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP11613987U 1987-07-29 1987-07-29 Pending JPS6421345U (US07345094-20080318-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11613987U JPS6421345U (US07345094-20080318-C00003.png) 1987-07-29 1987-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11613987U JPS6421345U (US07345094-20080318-C00003.png) 1987-07-29 1987-07-29

Publications (1)

Publication Number Publication Date
JPS6421345U true JPS6421345U (US07345094-20080318-C00003.png) 1989-02-02

Family

ID=31358404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11613987U Pending JPS6421345U (US07345094-20080318-C00003.png) 1987-07-29 1987-07-29

Country Status (1)

Country Link
JP (1) JPS6421345U (US07345094-20080318-C00003.png)

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