JPS642132U - - Google Patents

Info

Publication number
JPS642132U
JPS642132U JP9776887U JP9776887U JPS642132U JP S642132 U JPS642132 U JP S642132U JP 9776887 U JP9776887 U JP 9776887U JP 9776887 U JP9776887 U JP 9776887U JP S642132 U JPS642132 U JP S642132U
Authority
JP
Japan
Prior art keywords
pressure sensor
pressure
display
displays
display unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9776887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0645226Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9776887U priority Critical patent/JPH0645226Y2/ja
Publication of JPS642132U publication Critical patent/JPS642132U/ja
Application granted granted Critical
Publication of JPH0645226Y2 publication Critical patent/JPH0645226Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP9776887U 1987-06-24 1987-06-24 表示分離型圧力センサ Expired - Lifetime JPH0645226Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9776887U JPH0645226Y2 (ja) 1987-06-24 1987-06-24 表示分離型圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9776887U JPH0645226Y2 (ja) 1987-06-24 1987-06-24 表示分離型圧力センサ

Publications (2)

Publication Number Publication Date
JPS642132U true JPS642132U (US08063081-20111122-C00044.png) 1989-01-09
JPH0645226Y2 JPH0645226Y2 (ja) 1994-11-16

Family

ID=30965066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9776887U Expired - Lifetime JPH0645226Y2 (ja) 1987-06-24 1987-06-24 表示分離型圧力センサ

Country Status (1)

Country Link
JP (1) JPH0645226Y2 (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266503A (ja) * 2006-03-29 2007-10-11 Nec Electronics Corp 半導体製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266503A (ja) * 2006-03-29 2007-10-11 Nec Electronics Corp 半導体製造装置
JP4582715B2 (ja) * 2006-03-29 2010-11-17 ルネサスエレクトロニクス株式会社 半導体製造装置、並びに、感度調整のための装置及び方法

Also Published As

Publication number Publication date
JPH0645226Y2 (ja) 1994-11-16

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