JPS6420726U - - Google Patents
Info
- Publication number
- JPS6420726U JPS6420726U JP11470387U JP11470387U JPS6420726U JP S6420726 U JPS6420726 U JP S6420726U JP 11470387 U JP11470387 U JP 11470387U JP 11470387 U JP11470387 U JP 11470387U JP S6420726 U JPS6420726 U JP S6420726U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- rotating brush
- semiconductor wafer
- scrubber device
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000005201 scrubbing Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11470387U JPS6420726U (fr) | 1987-07-27 | 1987-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11470387U JPS6420726U (fr) | 1987-07-27 | 1987-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6420726U true JPS6420726U (fr) | 1989-02-01 |
Family
ID=31355693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11470387U Pending JPS6420726U (fr) | 1987-07-27 | 1987-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420726U (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5544780A (en) * | 1978-09-27 | 1980-03-29 | Toshiba Corp | Cleaning device for semiconductor wafer |
-
1987
- 1987-07-27 JP JP11470387U patent/JPS6420726U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5544780A (en) * | 1978-09-27 | 1980-03-29 | Toshiba Corp | Cleaning device for semiconductor wafer |