JPS642067U - - Google Patents

Info

Publication number
JPS642067U
JPS642067U JP9537187U JP9537187U JPS642067U JP S642067 U JPS642067 U JP S642067U JP 9537187 U JP9537187 U JP 9537187U JP 9537187 U JP9537187 U JP 9537187U JP S642067 U JPS642067 U JP S642067U
Authority
JP
Japan
Prior art keywords
reflecting mirror
strip
predetermined distance
mirror disposed
flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9537187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0630847Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9537187U priority Critical patent/JPH0630847Y2/ja
Publication of JPS642067U publication Critical patent/JPS642067U/ja
Application granted granted Critical
Publication of JPH0630847Y2 publication Critical patent/JPH0630847Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9537187U 1987-06-23 1987-06-23 ストリツプ温度検出装置 Expired - Lifetime JPH0630847Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9537187U JPH0630847Y2 (ja) 1987-06-23 1987-06-23 ストリツプ温度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9537187U JPH0630847Y2 (ja) 1987-06-23 1987-06-23 ストリツプ温度検出装置

Publications (2)

Publication Number Publication Date
JPS642067U true JPS642067U (ro) 1989-01-09
JPH0630847Y2 JPH0630847Y2 (ja) 1994-08-17

Family

ID=30959826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9537187U Expired - Lifetime JPH0630847Y2 (ja) 1987-06-23 1987-06-23 ストリツプ温度検出装置

Country Status (1)

Country Link
JP (1) JPH0630847Y2 (ro)

Also Published As

Publication number Publication date
JPH0630847Y2 (ja) 1994-08-17

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