JPS6419186U - - Google Patents
Info
- Publication number
- JPS6419186U JPS6419186U JP11432987U JP11432987U JPS6419186U JP S6419186 U JPS6419186 U JP S6419186U JP 11432987 U JP11432987 U JP 11432987U JP 11432987 U JP11432987 U JP 11432987U JP S6419186 U JPS6419186 U JP S6419186U
- Authority
- JP
- Japan
- Prior art keywords
- detection means
- sample
- pressure sensitive
- sensitive element
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11432987U JPS6419186U (cs) | 1987-07-25 | 1987-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11432987U JPS6419186U (cs) | 1987-07-25 | 1987-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6419186U true JPS6419186U (cs) | 1989-01-31 |
Family
ID=31354974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11432987U Pending JPS6419186U (cs) | 1987-07-25 | 1987-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6419186U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011243834A (ja) * | 2010-05-20 | 2011-12-01 | Tokyo Electron Ltd | プラズマ処理装置，基板保持機構，基板位置ずれ検出方法 |
-
1987
- 1987-07-25 JP JP11432987U patent/JPS6419186U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011243834A (ja) * | 2010-05-20 | 2011-12-01 | Tokyo Electron Ltd | プラズマ処理装置，基板保持機構，基板位置ずれ検出方法 |
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