JPS6419144U - - Google Patents
Info
- Publication number
- JPS6419144U JPS6419144U JP11476587U JP11476587U JPS6419144U JP S6419144 U JPS6419144 U JP S6419144U JP 11476587 U JP11476587 U JP 11476587U JP 11476587 U JP11476587 U JP 11476587U JP S6419144 U JPS6419144 U JP S6419144U
- Authority
- JP
- Japan
- Prior art keywords
- pressure chamber
- reference pressure
- electromagnetic coil
- temperature
- detection section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の第１実施例の破断図、第２図
はその電磁コイルへの通電電流量と基準圧力室
内の温度Ｔとの関係図、第３図は基準圧力室内の
温度Ｔと基準圧力Ｐとの関係図、第４図は本考案
の第２実施例の部分破断斜視図である。
１０……圧力検出器、２０，３００……圧力検
出部、３０……制御部、６０，３６０……基準圧
力室、９０，３１０……ダイヤフラム、１２０…
…スイツチ部、１４０……温度検出素子、１５０
，３２０……電磁コイル、３４０……被吸着部材
。
Fig. 1 is a cutaway diagram of the first embodiment of the present invention, Fig. 2 is a diagram showing the relationship between the amount of current flowing to the electromagnetic coil and the temperature T in the reference pressure chamber, and Fig. 3 is a diagram showing the relationship between the temperature T and the temperature in the reference pressure chamber. FIG. 4 is a partially cutaway perspective view of the second embodiment of the present invention. DESCRIPTION OF SYMBOLS 10...Pressure detector, 20,300...Pressure detection part, 30...Control part, 60,360...Reference pressure chamber, 90,310...Diaphragm, 120...
...Switch part, 140...Temperature detection element, 150
, 320... Electromagnetic coil, 340... Member to be attracted.
Claims (1)
フラムと、 該ダイヤフラムの垂直方向の変位を検出する変
位検出部とを有する圧力検出器において、 上記ダイヤフラムと上記基準圧力室内に設けら
れた吸引部との間に、電磁コイルと該電磁コイル
の被吸引部材とからなる吸引構造が形成されると
ともに、 上記基準圧力室内の温度を検出する温度検出部
と、 該温度検出部にて検出された上記基準圧力室内
の温度に応じて上記電磁コイルへの通電電流を制
御する吸引力制御部とを備えたことを特徴とする
圧力検出器。[Scope of Claim for Utility Model Registration] A pressure detector comprising a reference pressure chamber, a diaphragm separating the reference pressure chamber from the atmosphere to be measured, and a displacement detection section for detecting displacement of the diaphragm in the vertical direction, A suction structure consisting of an electromagnetic coil and a member to be attracted by the electromagnetic coil is formed between and a suction section provided in the reference pressure chamber, and a temperature detection section that detects the temperature inside the reference pressure chamber. A pressure detector comprising: a suction force control section that controls current flowing to the electromagnetic coil in accordance with the temperature within the reference pressure chamber detected by the temperature detection section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11476587U JPS6419144U (en) | 1987-07-27 | 1987-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11476587U JPS6419144U (en) | 1987-07-27 | 1987-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6419144U true JPS6419144U (en) | 1989-01-31 |
Family
ID=31355814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11476587U Pending JPS6419144U (en) | 1987-07-27 | 1987-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6419144U (en) |
-
1987
- 1987-07-27 JP JP11476587U patent/JPS6419144U/ja active Pending