JPS6418759U - - Google Patents
Info
- Publication number
- JPS6418759U JPS6418759U JP11427987U JP11427987U JPS6418759U JP S6418759 U JPS6418759 U JP S6418759U JP 11427987 U JP11427987 U JP 11427987U JP 11427987 U JP11427987 U JP 11427987U JP S6418759 U JPS6418759 U JP S6418759U
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating film
- thin film
- film transistor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000009719 polyimide resin Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000011147 inorganic material Substances 0.000 claims 1
- 229920005575 poly(amic acid) Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427987U JPS6418759U (de) | 1987-07-25 | 1987-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11427987U JPS6418759U (de) | 1987-07-25 | 1987-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418759U true JPS6418759U (de) | 1989-01-30 |
Family
ID=31354878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11427987U Pending JPS6418759U (de) | 1987-07-25 | 1987-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418759U (de) |
-
1987
- 1987-07-25 JP JP11427987U patent/JPS6418759U/ja active Pending