JPS6418742U - - Google Patents

Info

Publication number
JPS6418742U
JPS6418742U JP11336987U JP11336987U JPS6418742U JP S6418742 U JPS6418742 U JP S6418742U JP 11336987 U JP11336987 U JP 11336987U JP 11336987 U JP11336987 U JP 11336987U JP S6418742 U JPS6418742 U JP S6418742U
Authority
JP
Japan
Prior art keywords
stopper
wafer
box
carrier
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11336987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11336987U priority Critical patent/JPS6418742U/ja
Publication of JPS6418742U publication Critical patent/JPS6418742U/ja
Pending legal-status Critical Current

Links

JP11336987U 1987-07-23 1987-07-23 Pending JPS6418742U (US20020051482A1-20020502-M00057.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11336987U JPS6418742U (US20020051482A1-20020502-M00057.png) 1987-07-23 1987-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11336987U JPS6418742U (US20020051482A1-20020502-M00057.png) 1987-07-23 1987-07-23

Publications (1)

Publication Number Publication Date
JPS6418742U true JPS6418742U (US20020051482A1-20020502-M00057.png) 1989-01-30

Family

ID=31353143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11336987U Pending JPS6418742U (US20020051482A1-20020502-M00057.png) 1987-07-23 1987-07-23

Country Status (1)

Country Link
JP (1) JPS6418742U (US20020051482A1-20020502-M00057.png)

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