JPS6418739U - - Google Patents
Info
- Publication number
- JPS6418739U JPS6418739U JP11247987U JP11247987U JPS6418739U JP S6418739 U JPS6418739 U JP S6418739U JP 11247987 U JP11247987 U JP 11247987U JP 11247987 U JP11247987 U JP 11247987U JP S6418739 U JPS6418739 U JP S6418739U
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- space
- base
- primary unit
- reinforcing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003014 reinforcing effect Effects 0.000 claims 2
- 230000002787 reinforcement Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Machine Tool Units (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987112479U JPH0751792Y2 (ja) | 1987-07-22 | 1987-07-22 | リニアモ−タ式ステ−ジ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987112479U JPH0751792Y2 (ja) | 1987-07-22 | 1987-07-22 | リニアモ−タ式ステ−ジ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418739U true JPS6418739U (enExample) | 1989-01-30 |
| JPH0751792Y2 JPH0751792Y2 (ja) | 1995-11-22 |
Family
ID=31351452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987112479U Expired - Lifetime JPH0751792Y2 (ja) | 1987-07-22 | 1987-07-22 | リニアモ−タ式ステ−ジ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0751792Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61293741A (ja) * | 1985-06-21 | 1986-12-24 | Hiroshi Teramachi | テ−ブル移送装置 |
-
1987
- 1987-07-22 JP JP1987112479U patent/JPH0751792Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61293741A (ja) * | 1985-06-21 | 1986-12-24 | Hiroshi Teramachi | テ−ブル移送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0751792Y2 (ja) | 1995-11-22 |