JPS6418603U - - Google Patents
Info
- Publication number
- JPS6418603U JPS6418603U JP11271887U JP11271887U JPS6418603U JP S6418603 U JPS6418603 U JP S6418603U JP 11271887 U JP11271887 U JP 11271887U JP 11271887 U JP11271887 U JP 11271887U JP S6418603 U JPS6418603 U JP S6418603U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- drive shaft
- valve
- divided
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Fluid-Driven Valves (AREA)
- Actuator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11271887U JPS6418603U (enExample) | 1987-07-24 | 1987-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11271887U JPS6418603U (enExample) | 1987-07-24 | 1987-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418603U true JPS6418603U (enExample) | 1989-01-30 |
Family
ID=31351911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11271887U Pending JPS6418603U (enExample) | 1987-07-24 | 1987-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418603U (enExample) |
-
1987
- 1987-07-24 JP JP11271887U patent/JPS6418603U/ja active Pending