JPS641850U - - Google Patents
Info
- Publication number
- JPS641850U JPS641850U JP9435587U JP9435587U JPS641850U JP S641850 U JPS641850 U JP S641850U JP 9435587 U JP9435587 U JP 9435587U JP 9435587 U JP9435587 U JP 9435587U JP S641850 U JPS641850 U JP S641850U
- Authority
- JP
- Japan
- Prior art keywords
- container
- stirring
- polishing
- holding
- medium fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 4
- 238000003756 stirring Methods 0.000 claims description 4
Description
第１図は本考案に係る研磨装置の一実施例を示
す縦断面図、第２図は第１図のＡ―Ａ線断面図、
第３図は本実施例による研磨媒介流体の速度分布
を示すグラフ、第４図は本考案の他の実施例を示
す縦断面図、第５図乃至第８図は従来の研磨装置
を示す縦断面図である。
３……容器、４……研磨媒介流体、５……被研
磨部材、６……保持板、２１，２６……モータ、
２３……撹拌翼、２４……ラツク、２５……ピニ
オン。
FIG. 1 is a longitudinal cross-sectional view showing an embodiment of the polishing apparatus according to the present invention, FIG. 2 is a cross-sectional view taken along the line A--A in FIG.
FIG. 3 is a graph showing the velocity distribution of the polishing medium fluid according to this embodiment, FIG. 4 is a longitudinal cross-sectional view showing another embodiment of the present invention, and FIGS. 5 to 8 are longitudinal cross-sectional views showing a conventional polishing apparatus. It is a front view. 3... Container, 4... Polishing medium fluid, 5... Member to be polished, 6... Holding plate, 21, 26... Motor,
23... Stirring blade, 24... Rack, 25... Pinion.
Claims (1)
内において回転撹拌する撹拌手段と、被研磨部材
を前記研磨媒介流体中に保持する保持手段とを具
備した研磨装置において、前記撹拌手段を上下方
向に移動させる駆動手段を前記容器の上部に設け
るとともに、前記保持手段を前記容器の外壁内面
に少くとも１個設けたことを特徴とする研磨装置
。 (2) 容器は回転手段により回転可能に支持され
たことを特徴とする実用新案登録請求の範囲第１
項記載の研磨装置。[Claims for Utility Model Registration] (1) A system comprising: a stirring means for rotating and stirring a polishing medium fluid contained in a container; and a holding means for holding a member to be polished in the polishing medium fluid. A polishing apparatus, characterized in that a drive means for moving the stirring means in the vertical direction is provided on the upper part of the container, and at least one holding means is provided on the inner surface of the outer wall of the container. (2) Utility model registration claim 1 characterized in that the container is rotatably supported by a rotating means
The polishing device described in Section 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9435587U JPS641850U (en) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9435587U JPS641850U (en) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS641850U true JPS641850U (en) | 1989-01-09 |
Family
ID=30957726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9435587U Pending JPS641850U (en) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641850U (en) |
-
1987
- 1987-06-19 JP JP9435587U patent/JPS641850U/ja active Pending