JPS6416654U - - Google Patents
Info
- Publication number
- JPS6416654U JPS6416654U JP11173187U JP11173187U JPS6416654U JP S6416654 U JPS6416654 U JP S6416654U JP 11173187 U JP11173187 U JP 11173187U JP 11173187 U JP11173187 U JP 11173187U JP S6416654 U JPS6416654 U JP S6416654U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- gas
- rare gas
- excimer laser
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 6
- 150000004820 halides Chemical class 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 2
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173187U JPS6416654U (cs) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11173187U JPS6416654U (cs) | 1987-07-20 | 1987-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416654U true JPS6416654U (cs) | 1989-01-27 |
Family
ID=31350040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11173187U Pending JPS6416654U (cs) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416654U (cs) |
-
1987
- 1987-07-20 JP JP11173187U patent/JPS6416654U/ja active Pending