JPS6416260U - - Google Patents

Info

Publication number
JPS6416260U
JPS6416260U JP1987111118U JP11111887U JPS6416260U JP S6416260 U JPS6416260 U JP S6416260U JP 1987111118 U JP1987111118 U JP 1987111118U JP 11111887 U JP11111887 U JP 11111887U JP S6416260 U JPS6416260 U JP S6416260U
Authority
JP
Japan
Prior art keywords
pressing
plate
turntable
outer periphery
pressing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987111118U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440848Y2 (US08063081-20111122-C00044.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987111118U priority Critical patent/JPH0440848Y2/ja
Publication of JPS6416260U publication Critical patent/JPS6416260U/ja
Application granted granted Critical
Publication of JPH0440848Y2 publication Critical patent/JPH0440848Y2/ja
Expired legal-status Critical Current

Links

JP1987111118U 1987-07-20 1987-07-20 Expired JPH0440848Y2 (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987111118U JPH0440848Y2 (US08063081-20111122-C00044.png) 1987-07-20 1987-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987111118U JPH0440848Y2 (US08063081-20111122-C00044.png) 1987-07-20 1987-07-20

Publications (2)

Publication Number Publication Date
JPS6416260U true JPS6416260U (US08063081-20111122-C00044.png) 1989-01-26
JPH0440848Y2 JPH0440848Y2 (US08063081-20111122-C00044.png) 1992-09-25

Family

ID=31348886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987111118U Expired JPH0440848Y2 (US08063081-20111122-C00044.png) 1987-07-20 1987-07-20

Country Status (1)

Country Link
JP (1) JPH0440848Y2 (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135464A (ja) * 1987-11-16 1989-05-29 Mitsubishi Metal Corp 研磨装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194874A (en) * 1981-05-27 1982-11-30 Hitachi Ltd Lapping device
JPS63150156A (ja) * 1986-12-16 1988-06-22 Naoetsu Denshi Kogyo Kk ウエハ−研摩装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194874A (en) * 1981-05-27 1982-11-30 Hitachi Ltd Lapping device
JPS63150156A (ja) * 1986-12-16 1988-06-22 Naoetsu Denshi Kogyo Kk ウエハ−研摩装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135464A (ja) * 1987-11-16 1989-05-29 Mitsubishi Metal Corp 研磨装置

Also Published As

Publication number Publication date
JPH0440848Y2 (US08063081-20111122-C00044.png) 1992-09-25

Similar Documents

Publication Publication Date Title
JPS6416260U (US08063081-20111122-C00044.png)
JPS63108709U (US08063081-20111122-C00044.png)
JPH02133455U (US08063081-20111122-C00044.png)
JPS6218437U (US08063081-20111122-C00044.png)
JPH02100768U (US08063081-20111122-C00044.png)
JPH0380172U (US08063081-20111122-C00044.png)
JPH0265453U (US08063081-20111122-C00044.png)
JPH0439070U (US08063081-20111122-C00044.png)
JPH0248238U (US08063081-20111122-C00044.png)
JPS6246550U (US08063081-20111122-C00044.png)
JPH0247435U (US08063081-20111122-C00044.png)
JPS634441U (US08063081-20111122-C00044.png)
JPS61200610U (US08063081-20111122-C00044.png)
JPS62137623U (US08063081-20111122-C00044.png)
JPH0375918U (US08063081-20111122-C00044.png)
JPH0210361U (US08063081-20111122-C00044.png)
JPS6396332U (US08063081-20111122-C00044.png)
JPS63132437U (US08063081-20111122-C00044.png)
JPS6241495U (US08063081-20111122-C00044.png)
JPH02132946U (US08063081-20111122-C00044.png)
JPS62161579U (US08063081-20111122-C00044.png)
JPS6261321U (US08063081-20111122-C00044.png)
JPH0364856U (US08063081-20111122-C00044.png)
JPS63197033U (US08063081-20111122-C00044.png)
JPS61103137U (US08063081-20111122-C00044.png)