JPS6416157U - - Google Patents

Info

Publication number
JPS6416157U
JPS6416157U JP10970987U JP10970987U JPS6416157U JP S6416157 U JPS6416157 U JP S6416157U JP 10970987 U JP10970987 U JP 10970987U JP 10970987 U JP10970987 U JP 10970987U JP S6416157 U JPS6416157 U JP S6416157U
Authority
JP
Japan
Prior art keywords
fixed
stator
rotor
motor
rotating part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10970987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10970987U priority Critical patent/JPS6416157U/ja
Publication of JPS6416157U publication Critical patent/JPS6416157U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Motor Or Generator Frames (AREA)
  • Manufacture Of Motors, Generators (AREA)
JP10970987U 1987-07-17 1987-07-17 Pending JPS6416157U (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10970987U JPS6416157U (US06653308-20031125-C00197.png) 1987-07-17 1987-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10970987U JPS6416157U (US06653308-20031125-C00197.png) 1987-07-17 1987-07-17

Publications (1)

Publication Number Publication Date
JPS6416157U true JPS6416157U (US06653308-20031125-C00197.png) 1989-01-26

Family

ID=31346202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10970987U Pending JPS6416157U (US06653308-20031125-C00197.png) 1987-07-17 1987-07-17

Country Status (1)

Country Link
JP (1) JPS6416157U (US06653308-20031125-C00197.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002534282A (ja) * 1998-12-30 2002-10-15 ブルックス オートメーション インコーポレイテッド 共通回転軸を有する複数アームを持つ基板搬送装置
JP2011205878A (ja) * 2009-12-25 2011-10-13 Canon Anelva Corp 真空アクチュエータ及び基板搬送ロボット

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002534282A (ja) * 1998-12-30 2002-10-15 ブルックス オートメーション インコーポレイテッド 共通回転軸を有する複数アームを持つ基板搬送装置
JP2011205878A (ja) * 2009-12-25 2011-10-13 Canon Anelva Corp 真空アクチュエータ及び基板搬送ロボット
US8912697B2 (en) 2009-12-25 2014-12-16 Canon Anelva Corporation Vacuum actuator including a stator forming a part of a vacuum partition wall

Similar Documents

Publication Publication Date Title
JPH01171563U (US06653308-20031125-C00197.png)
JPS6416157U (US06653308-20031125-C00197.png)
JPS649435U (US06653308-20031125-C00197.png)
JPS6420057U (US06653308-20031125-C00197.png)
JPH0444490U (US06653308-20031125-C00197.png)
JPH0182325U (US06653308-20031125-C00197.png)
JPH02142958U (US06653308-20031125-C00197.png)
JPS6329374U (US06653308-20031125-C00197.png)
JPS6340149U (US06653308-20031125-C00197.png)
JPS62165741U (US06653308-20031125-C00197.png)
JPH0451640U (US06653308-20031125-C00197.png)
JPS6284357U (US06653308-20031125-C00197.png)
JPH0196760U (US06653308-20031125-C00197.png)
JPH0424687U (US06653308-20031125-C00197.png)
JPH0257261U (US06653308-20031125-C00197.png)
JPS62145470U (US06653308-20031125-C00197.png)
JPS6261170U (US06653308-20031125-C00197.png)
JPS63178668U (US06653308-20031125-C00197.png)
JPH01149067U (US06653308-20031125-C00197.png)
JPS63100959U (US06653308-20031125-C00197.png)
JPS6382076U (US06653308-20031125-C00197.png)
JPS6430190U (US06653308-20031125-C00197.png)
JPS6310757U (US06653308-20031125-C00197.png)
JPH03129795U (US06653308-20031125-C00197.png)
JPS627754U (US06653308-20031125-C00197.png)