JPS6416054U - - Google Patents
Info
- Publication number
- JPS6416054U JPS6416054U JP11012587U JP11012587U JPS6416054U JP S6416054 U JPS6416054 U JP S6416054U JP 11012587 U JP11012587 U JP 11012587U JP 11012587 U JP11012587 U JP 11012587U JP S6416054 U JPS6416054 U JP S6416054U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- clamp arm
- disk
- spring
- lever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11012587U JPH0517798Y2 (un) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11012587U JPH0517798Y2 (un) | 1987-07-20 | 1987-07-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6416054U true JPS6416054U (un) | 1989-01-26 |
JPH0517798Y2 JPH0517798Y2 (un) | 1993-05-12 |
Family
ID=31346998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11012587U Expired - Lifetime JPH0517798Y2 (un) | 1987-07-20 | 1987-07-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0517798Y2 (un) |
-
1987
- 1987-07-20 JP JP11012587U patent/JPH0517798Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0517798Y2 (un) | 1993-05-12 |