JPS6416054U - - Google Patents

Info

Publication number
JPS6416054U
JPS6416054U JP11012587U JP11012587U JPS6416054U JP S6416054 U JPS6416054 U JP S6416054U JP 11012587 U JP11012587 U JP 11012587U JP 11012587 U JP11012587 U JP 11012587U JP S6416054 U JPS6416054 U JP S6416054U
Authority
JP
Japan
Prior art keywords
wafer
clamp arm
disk
spring
lever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11012587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517798Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11012587U priority Critical patent/JPH0517798Y2/ja
Publication of JPS6416054U publication Critical patent/JPS6416054U/ja
Application granted granted Critical
Publication of JPH0517798Y2 publication Critical patent/JPH0517798Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11012587U 1987-07-20 1987-07-20 Expired - Lifetime JPH0517798Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11012587U JPH0517798Y2 (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11012587U JPH0517798Y2 (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Publications (2)

Publication Number Publication Date
JPS6416054U true JPS6416054U (enrdf_load_stackoverflow) 1989-01-26
JPH0517798Y2 JPH0517798Y2 (enrdf_load_stackoverflow) 1993-05-12

Family

ID=31346998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11012587U Expired - Lifetime JPH0517798Y2 (enrdf_load_stackoverflow) 1987-07-20 1987-07-20

Country Status (1)

Country Link
JP (1) JPH0517798Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0517798Y2 (enrdf_load_stackoverflow) 1993-05-12

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