JPS6415966U - - Google Patents
Info
- Publication number
- JPS6415966U JPS6415966U JP10715687U JP10715687U JPS6415966U JP S6415966 U JPS6415966 U JP S6415966U JP 10715687 U JP10715687 U JP 10715687U JP 10715687 U JP10715687 U JP 10715687U JP S6415966 U JPS6415966 U JP S6415966U
- Authority
- JP
- Japan
- Prior art keywords
- flexible portion
- semiconductor
- semiconductor substrate
- quantity sensor
- polymer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 3
- 229920000592 inorganic polymer Polymers 0.000 claims 1
- 229920000620 organic polymer Polymers 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715687U JPS6415966U (enExample) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715687U JPS6415966U (enExample) | 1987-07-13 | 1987-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6415966U true JPS6415966U (enExample) | 1989-01-26 |
Family
ID=31341316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10715687U Pending JPS6415966U (enExample) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6415966U (enExample) |
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1987
- 1987-07-13 JP JP10715687U patent/JPS6415966U/ja active Pending