JPS6415927U - - Google Patents
Info
- Publication number
- JPS6415927U JPS6415927U JP10642187U JP10642187U JPS6415927U JP S6415927 U JPS6415927 U JP S6415927U JP 10642187 U JP10642187 U JP 10642187U JP 10642187 U JP10642187 U JP 10642187U JP S6415927 U JPS6415927 U JP S6415927U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- concentration distribution
- filter
- laser beam
- distribution filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
第１図はこの考案の一実施例を示す部分断面略
線図、第２図は濃度分布フイルタの特性を例示す
る図、第３図は従来例を示す部分断面図である。 １１……ハウジング、１２……弾性手段、１３
……濃度分布フイルタ、１４……発光素子、１５
，１８……光フアイバ、１６，１９……光コネク
タ、１７……受光素子。
線図、第２図は濃度分布フイルタの特性を例示す
る図、第３図は従来例を示す部分断面図である。 １１……ハウジング、１２……弾性手段、１３
……濃度分布フイルタ、１４……発光素子、１５
，１８……光フアイバ、１６，１９……光コネク
タ、１７……受光素子。
Claims (1)
- ハウジング１１と、このハウジング内に弾性支
持した濃度分布フイルタ１３と、ハウジングに連
結されて、濃度分布フイルタを横切る方向へレー
ザ光線を出力する発光素子１４と、これもまたハ
ウジングに連絡され、濃度分布フイルタを通過し
たレーザ光線を受ける受光素子１７とを具えてな
る振動センサ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642187U JPS6415927U (ja) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642187U JPS6415927U (ja) | 1987-07-13 | 1987-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6415927U true JPS6415927U (ja) | 1989-01-26 |
Family
ID=31339917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10642187U Pending JPS6415927U (ja) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6415927U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7615132B2 (en) | 2003-10-17 | 2009-11-10 | Hitachi High-Technologies Corporation | Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method |
-
1987
- 1987-07-13 JP JP10642187U patent/JPS6415927U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7615132B2 (en) | 2003-10-17 | 2009-11-10 | Hitachi High-Technologies Corporation | Plasma processing apparatus having high frequency power source with sag compensation function and plasma processing method |