JPS6413660U - - Google Patents
Info
- Publication number
- JPS6413660U JPS6413660U JP10870187U JP10870187U JPS6413660U JP S6413660 U JPS6413660 U JP S6413660U JP 10870187 U JP10870187 U JP 10870187U JP 10870187 U JP10870187 U JP 10870187U JP S6413660 U JPS6413660 U JP S6413660U
- Authority
- JP
- Japan
- Prior art keywords
- gutter
- vacuum chamber
- flange
- beam outlet
- side wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims 2
- 239000003507 refrigerant Substances 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 239000011888 foil Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108701U JPH0610615Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108701U JPH0610615Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6413660U true JPS6413660U (ro) | 1989-01-24 |
| JPH0610615Y2 JPH0610615Y2 (ja) | 1994-03-16 |
Family
ID=31344282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987108701U Expired - Lifetime JPH0610615Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610615Y2 (ro) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5281600U (ro) * | 1975-12-17 | 1977-06-17 |
-
1987
- 1987-07-14 JP JP1987108701U patent/JPH0610615Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5281600U (ro) * | 1975-12-17 | 1977-06-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610615Y2 (ja) | 1994-03-16 |