JPS6413414A - Inclination sensor - Google Patents

Abstract

PURPOSE:To improve detection accuracy and to detect even planar inclination by detecting a tilt angle to a horizontal surface by an electric means. CONSTITUTION:The pedestal 4 of an inclination sensor 1 is fitted on a plane to be measures or the reference surface of an inclinometer, and it is assumed that the surface slants to the horizontal surface at a tilt angle theta. Here, every four strain gages 3 are formed on a diaphragm 2 in an X- and a Y-axial direction and serve as detecting elements to form a bridge circuit, and when force F operates by load mass 7 in the gravitational direction to cause the diaphragm 2 to flex and deform, the strain gages 3 increase or decrease in resistance value, so the bridge enters an unbalanced state, so that an electric signal is detected. The X-axial and Y-axial force components Fx and Fy of the force F are proportional to the X-axial and Y-axial deformation quantities of the diaphragm 2 and detected from the electric signal, and the X-axial and Y-axial tilt angles thetax and thetay are calculated to find the tilt angle theta of the inclination sensor 1 to the horizontal surface.