JPS6413134U - - Google Patents
Info
- Publication number
- JPS6413134U JPS6413134U JP1987105942U JP10594287U JPS6413134U JP S6413134 U JPS6413134 U JP S6413134U JP 1987105942 U JP1987105942 U JP 1987105942U JP 10594287 U JP10594287 U JP 10594287U JP S6413134 U JPS6413134 U JP S6413134U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- carrier
- partition wall
- carrier body
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105942U JPS6413134U (enExample) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105942U JPS6413134U (enExample) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413134U true JPS6413134U (enExample) | 1989-01-24 |
Family
ID=31339008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987105942U Pending JPS6413134U (enExample) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413134U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0420657A (ja) * | 1990-05-14 | 1992-01-24 | Nikko Co Ltd | 足場研掃機 |
-
1987
- 1987-07-10 JP JP1987105942U patent/JPS6413134U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0420657A (ja) * | 1990-05-14 | 1992-01-24 | Nikko Co Ltd | 足場研掃機 |