JPS6413133U - - Google Patents
Info
- Publication number
- JPS6413133U JPS6413133U JP10795187U JP10795187U JPS6413133U JP S6413133 U JPS6413133 U JP S6413133U JP 10795187 U JP10795187 U JP 10795187U JP 10795187 U JP10795187 U JP 10795187U JP S6413133 U JPS6413133 U JP S6413133U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve seat
- air throttle
- adsorption stage
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10795187U JPS6413133U (de) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10795187U JPS6413133U (de) | 1987-07-13 | 1987-07-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6413133U true JPS6413133U (de) | 1989-01-24 |
Family
ID=31342830
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10795187U Pending JPS6413133U (de) | 1987-07-13 | 1987-07-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6413133U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014187213A (ja) * | 2013-03-23 | 2014-10-02 | Kyocera Corp | 吸着部材、これを用いた真空吸着装置および冷却装置ならびに吸着部材の製造方法 |
JP2015217415A (ja) * | 2014-05-16 | 2015-12-07 | 川崎重工業株式会社 | 吸着定盤及び溶接ロボットシステム |
-
1987
- 1987-07-13 JP JP10795187U patent/JPS6413133U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014187213A (ja) * | 2013-03-23 | 2014-10-02 | Kyocera Corp | 吸着部材、これを用いた真空吸着装置および冷却装置ならびに吸着部材の製造方法 |
JP2015217415A (ja) * | 2014-05-16 | 2015-12-07 | 川崎重工業株式会社 | 吸着定盤及び溶接ロボットシステム |