JPS6413125U - - Google Patents

Info

Publication number

JPS6413125U

JPS6413125U JP10781587U JP10781587U JPS6413125U JP S6413125 U JPS6413125 U JP S6413125U JP 10781587 U JP10781587 U JP 10781587U JP 10781587 U JP10781587 U JP 10781587U JP S6413125 U JPS6413125 U JP S6413125U

Authority

JP

Japan

Prior art keywords

wiring pattern

laminated

semiconductor device

covered

protective film

Prior art date

1987-07-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 2
• 229910052581 Si3N4 Inorganic materials 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 230000001681 protective effect Effects 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
• 229920005591 polysilicon Polymers 0.000 description 1