JPS6412791U - - Google Patents
Info
- Publication number
- JPS6412791U JPS6412791U JP10758687U JP10758687U JPS6412791U JP S6412791 U JPS6412791 U JP S6412791U JP 10758687 U JP10758687 U JP 10758687U JP 10758687 U JP10758687 U JP 10758687U JP S6412791 U JPS6412791 U JP S6412791U
- Authority
- JP
- Japan
- Prior art keywords
- hot atmosphere
- head section
- robot
- arm
- emergency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005255 carburizing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10758687U JPH0643168Y2 (ja) | 1987-07-15 | 1987-07-15 | 熱雰囲気作業ロボットの安全装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10758687U JPH0643168Y2 (ja) | 1987-07-15 | 1987-07-15 | 熱雰囲気作業ロボットの安全装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6412791U true JPS6412791U (show.php) | 1989-01-23 |
| JPH0643168Y2 JPH0643168Y2 (ja) | 1994-11-09 |
Family
ID=31342131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10758687U Expired - Lifetime JPH0643168Y2 (ja) | 1987-07-15 | 1987-07-15 | 熱雰囲気作業ロボットの安全装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0643168Y2 (show.php) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001097262A1 (en) | 2000-06-16 | 2001-12-20 | Tokyo Electron Limited | Semiconductor manufacturing apparatus detecting a state of connection between controllers |
-
1987
- 1987-07-15 JP JP10758687U patent/JPH0643168Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0643168Y2 (ja) | 1994-11-09 |