JPS6412791U - - Google Patents

Info

Publication number
JPS6412791U
JPS6412791U JP10758687U JP10758687U JPS6412791U JP S6412791 U JPS6412791 U JP S6412791U JP 10758687 U JP10758687 U JP 10758687U JP 10758687 U JP10758687 U JP 10758687U JP S6412791 U JPS6412791 U JP S6412791U
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JP
Japan
Prior art keywords
hot atmosphere
head section
robot
arm
emergency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10758687U
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English (en)
Japanese (ja)
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JPH0643168Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10758687U priority Critical patent/JPH0643168Y2/ja
Publication of JPS6412791U publication Critical patent/JPS6412791U/ja
Application granted granted Critical
Publication of JPH0643168Y2 publication Critical patent/JPH0643168Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP10758687U 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置 Expired - Lifetime JPH0643168Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10758687U JPH0643168Y2 (ja) 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10758687U JPH0643168Y2 (ja) 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置

Publications (2)

Publication Number Publication Date
JPS6412791U true JPS6412791U (enrdf_load_stackoverflow) 1989-01-23
JPH0643168Y2 JPH0643168Y2 (ja) 1994-11-09

Family

ID=31342131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10758687U Expired - Lifetime JPH0643168Y2 (ja) 1987-07-15 1987-07-15 熱雰囲気作業ロボットの安全装置

Country Status (1)

Country Link
JP (1) JPH0643168Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001097262A1 (en) 2000-06-16 2001-12-20 Tokyo Electron Limited Semiconductor manufacturing apparatus detecting a state of connection between controllers

Also Published As

Publication number Publication date
JPH0643168Y2 (ja) 1994-11-09

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