JPS6412749U - - Google Patents
Info
- Publication number
- JPS6412749U JPS6412749U JP10645387U JP10645387U JPS6412749U JP S6412749 U JPS6412749 U JP S6412749U JP 10645387 U JP10645387 U JP 10645387U JP 10645387 U JP10645387 U JP 10645387U JP S6412749 U JPS6412749 U JP S6412749U
- Authority
- JP
- Japan
- Prior art keywords
- disc material
- arm according
- disc
- scoop
- scooping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Specific Conveyance Elements (AREA)
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10645387U JPS6412749U (en, 2012) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10645387U JPS6412749U (en, 2012) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412749U true JPS6412749U (en, 2012) | 1989-01-23 |
Family
ID=31339982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10645387U Pending JPS6412749U (en, 2012) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412749U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07169818A (ja) * | 1994-09-19 | 1995-07-04 | Sony Corp | ウエハ搬送具 |
| KR101423813B1 (ko) * | 2010-09-14 | 2014-07-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 반송 기구, 기판 처리 장치 및 반도체 장치의 제조 방법 |
-
1987
- 1987-07-10 JP JP10645387U patent/JPS6412749U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07169818A (ja) * | 1994-09-19 | 1995-07-04 | Sony Corp | ウエハ搬送具 |
| KR101423813B1 (ko) * | 2010-09-14 | 2014-07-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 반송 기구, 기판 처리 장치 및 반도체 장치의 제조 방법 |