JPS6412555U - - Google Patents

Info

Publication number
JPS6412555U
JPS6412555U JP10534787U JP10534787U JPS6412555U JP S6412555 U JPS6412555 U JP S6412555U JP 10534787 U JP10534787 U JP 10534787U JP 10534787 U JP10534787 U JP 10534787U JP S6412555 U JPS6412555 U JP S6412555U
Authority
JP
Japan
Prior art keywords
damper
arm
activation
actuator
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10534787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10534787U priority Critical patent/JPS6412555U/ja
Publication of JPS6412555U publication Critical patent/JPS6412555U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Air-Flow Control Members (AREA)
JP10534787U 1987-07-10 1987-07-10 Pending JPS6412555U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10534787U JPS6412555U (zh) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10534787U JPS6412555U (zh) 1987-07-10 1987-07-10

Publications (1)

Publication Number Publication Date
JPS6412555U true JPS6412555U (zh) 1989-01-23

Family

ID=31337880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10534787U Pending JPS6412555U (zh) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPS6412555U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02308976A (ja) * 1989-05-24 1990-12-21 Toki Corp Kk アクチュエータ
US7387229B2 (en) 1998-06-19 2008-06-17 Matsushita Electric Industrial Co., Ltd. Method of forming bumps on a wafer utilizing a post-heating operation, and an apparatus therefore

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02308976A (ja) * 1989-05-24 1990-12-21 Toki Corp Kk アクチュエータ
US7387229B2 (en) 1998-06-19 2008-06-17 Matsushita Electric Industrial Co., Ltd. Method of forming bumps on a wafer utilizing a post-heating operation, and an apparatus therefore

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