JPS6412400U - - Google Patents
Info
- Publication number
- JPS6412400U JPS6412400U JP10702387U JP10702387U JPS6412400U JP S6412400 U JPS6412400 U JP S6412400U JP 10702387 U JP10702387 U JP 10702387U JP 10702387 U JP10702387 U JP 10702387U JP S6412400 U JPS6412400 U JP S6412400U
- Authority
- JP
- Japan
- Prior art keywords
- auxiliary electrode
- cylindrical member
- carrier gas
- electrode made
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012159 carrier gas Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10702387U JPS6412400U (sv) | 1987-07-14 | 1987-07-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10702387U JPS6412400U (sv) | 1987-07-14 | 1987-07-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6412400U true JPS6412400U (sv) | 1989-01-23 |
Family
ID=31341057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10702387U Pending JPS6412400U (sv) | 1987-07-14 | 1987-07-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6412400U (sv) |
-
1987
- 1987-07-14 JP JP10702387U patent/JPS6412400U/ja active Pending