JPS6412365U - - Google Patents

Info

Publication number
JPS6412365U
JPS6412365U JP10690087U JP10690087U JPS6412365U JP S6412365 U JPS6412365 U JP S6412365U JP 10690087 U JP10690087 U JP 10690087U JP 10690087 U JP10690087 U JP 10690087U JP S6412365 U JPS6412365 U JP S6412365U
Authority
JP
Japan
Prior art keywords
oven
container
ion source
plasma generation
storage container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10690087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10690087U priority Critical patent/JPS6412365U/ja
Publication of JPS6412365U publication Critical patent/JPS6412365U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10690087U 1987-07-10 1987-07-10 Pending JPS6412365U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10690087U JPS6412365U (US07655688-20100202-C00086.png) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10690087U JPS6412365U (US07655688-20100202-C00086.png) 1987-07-10 1987-07-10

Publications (1)

Publication Number Publication Date
JPS6412365U true JPS6412365U (US07655688-20100202-C00086.png) 1989-01-23

Family

ID=31340823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10690087U Pending JPS6412365U (US07655688-20100202-C00086.png) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPS6412365U (US07655688-20100202-C00086.png)

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