JPS6412363U - - Google Patents

Info

Publication number
JPS6412363U
JPS6412363U JP10674087U JP10674087U JPS6412363U JP S6412363 U JPS6412363 U JP S6412363U JP 10674087 U JP10674087 U JP 10674087U JP 10674087 U JP10674087 U JP 10674087U JP S6412363 U JPS6412363 U JP S6412363U
Authority
JP
Japan
Prior art keywords
ion source
introduction tube
oven
metal vapor
source chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10674087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10674087U priority Critical patent/JPS6412363U/ja
Publication of JPS6412363U publication Critical patent/JPS6412363U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10674087U 1987-07-11 1987-07-11 Pending JPS6412363U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10674087U JPS6412363U (US20100223739A1-20100909-C00005.png) 1987-07-11 1987-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10674087U JPS6412363U (US20100223739A1-20100909-C00005.png) 1987-07-11 1987-07-11

Publications (1)

Publication Number Publication Date
JPS6412363U true JPS6412363U (US20100223739A1-20100909-C00005.png) 1989-01-23

Family

ID=31340524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10674087U Pending JPS6412363U (US20100223739A1-20100909-C00005.png) 1987-07-11 1987-07-11

Country Status (1)

Country Link
JP (1) JPS6412363U (US20100223739A1-20100909-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016046939A1 (ja) * 2014-09-25 2017-04-27 三菱電機株式会社 イオン注入装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016046939A1 (ja) * 2014-09-25 2017-04-27 三菱電機株式会社 イオン注入装置

Similar Documents

Publication Publication Date Title
JPS6412363U (US20100223739A1-20100909-C00005.png)
DE3368755D1 (en) Heating element for heating receptacles
JPH0198645U (US20100223739A1-20100909-C00005.png)
JPS6412362U (US20100223739A1-20100909-C00005.png)
JPS5743484A (en) Rubidium atomic oscillator
JPS6410946U (US20100223739A1-20100909-C00005.png)
JPS6136151B2 (US20100223739A1-20100909-C00005.png)
JPH0369852U (US20100223739A1-20100909-C00005.png)
JPS6186607U (US20100223739A1-20100909-C00005.png)
JPS59162633U (ja) 低温域黒体炉
JPS6245434Y2 (US20100223739A1-20100909-C00005.png)
ES8204059A1 (es) Dispositivo calefactor de combustible accionado electrica- mente para usar en un sistema de suministro de combustible de un motor de encendido por compresion
JPS61194949U (US20100223739A1-20100909-C00005.png)
JPH02138843U (US20100223739A1-20100909-C00005.png)
JPS6243201U (US20100223739A1-20100909-C00005.png)
JPH0270196U (US20100223739A1-20100909-C00005.png)
JPS6438172U (US20100223739A1-20100909-C00005.png)
JPS62141198U (US20100223739A1-20100909-C00005.png)
JPS63163268U (US20100223739A1-20100909-C00005.png)
JPS6176693U (US20100223739A1-20100909-C00005.png)
JPH02108293U (US20100223739A1-20100909-C00005.png)
JPH02131107U (US20100223739A1-20100909-C00005.png)
JPS58177024U (ja) 保温式ガス炊飯器
JPS6060520U (ja) 輻射式燃焼器具
JPS60185116U (ja) 電子レンジ