JPS6412362U - - Google Patents

Info

Publication number
JPS6412362U
JPS6412362U JP10673987U JP10673987U JPS6412362U JP S6412362 U JPS6412362 U JP S6412362U JP 10673987 U JP10673987 U JP 10673987U JP 10673987 U JP10673987 U JP 10673987U JP S6412362 U JPS6412362 U JP S6412362U
Authority
JP
Japan
Prior art keywords
ion source
oven
solid metal
source chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10673987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10673987U priority Critical patent/JPS6412362U/ja
Publication of JPS6412362U publication Critical patent/JPS6412362U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10673987U 1987-07-11 1987-07-11 Pending JPS6412362U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10673987U JPS6412362U (US20100223739A1-20100909-C00005.png) 1987-07-11 1987-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10673987U JPS6412362U (US20100223739A1-20100909-C00005.png) 1987-07-11 1987-07-11

Publications (1)

Publication Number Publication Date
JPS6412362U true JPS6412362U (US20100223739A1-20100909-C00005.png) 1989-01-23

Family

ID=31340522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10673987U Pending JPS6412362U (US20100223739A1-20100909-C00005.png) 1987-07-11 1987-07-11

Country Status (1)

Country Link
JP (1) JPS6412362U (US20100223739A1-20100909-C00005.png)

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