JPS6412360U - - Google Patents
Info
- Publication number
- JPS6412360U JPS6412360U JP10673787U JP10673787U JPS6412360U JP S6412360 U JPS6412360 U JP S6412360U JP 10673787 U JP10673787 U JP 10673787U JP 10673787 U JP10673787 U JP 10673787U JP S6412360 U JPS6412360 U JP S6412360U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- ion source
- chamber
- connection part
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10673787U JPS6412360U (enExample) | 1987-07-11 | 1987-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10673787U JPS6412360U (enExample) | 1987-07-11 | 1987-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412360U true JPS6412360U (enExample) | 1989-01-23 |
Family
ID=31340518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10673787U Pending JPS6412360U (enExample) | 1987-07-11 | 1987-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412360U (enExample) |
-
1987
- 1987-07-11 JP JP10673787U patent/JPS6412360U/ja active Pending