JPS6412360U - - Google Patents

Info

Publication number
JPS6412360U
JPS6412360U JP10673787U JP10673787U JPS6412360U JP S6412360 U JPS6412360 U JP S6412360U JP 10673787 U JP10673787 U JP 10673787U JP 10673787 U JP10673787 U JP 10673787U JP S6412360 U JPS6412360 U JP S6412360U
Authority
JP
Japan
Prior art keywords
oven
ion source
chamber
connection part
gate valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10673787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10673787U priority Critical patent/JPS6412360U/ja
Publication of JPS6412360U publication Critical patent/JPS6412360U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10673787U 1987-07-11 1987-07-11 Pending JPS6412360U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10673787U JPS6412360U (enrdf_load_html_response) 1987-07-11 1987-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10673787U JPS6412360U (enrdf_load_html_response) 1987-07-11 1987-07-11

Publications (1)

Publication Number Publication Date
JPS6412360U true JPS6412360U (enrdf_load_html_response) 1989-01-23

Family

ID=31340518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10673787U Pending JPS6412360U (enrdf_load_html_response) 1987-07-11 1987-07-11

Country Status (1)

Country Link
JP (1) JPS6412360U (enrdf_load_html_response)

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