JPS6411541U - - Google Patents

Info

Publication number
JPS6411541U
JPS6411541U JP10503687U JP10503687U JPS6411541U JP S6411541 U JPS6411541 U JP S6411541U JP 10503687 U JP10503687 U JP 10503687U JP 10503687 U JP10503687 U JP 10503687U JP S6411541 U JPS6411541 U JP S6411541U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
positioning jig
protrusions
conveyed
stopping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10503687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10503687U priority Critical patent/JPS6411541U/ja
Publication of JPS6411541U publication Critical patent/JPS6411541U/ja
Pending legal-status Critical Current

Links

JP10503687U 1987-07-07 1987-07-07 Pending JPS6411541U (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10503687U JPS6411541U (US20030220297A1-20031127-C00074.png) 1987-07-07 1987-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10503687U JPS6411541U (US20030220297A1-20031127-C00074.png) 1987-07-07 1987-07-07

Publications (1)

Publication Number Publication Date
JPS6411541U true JPS6411541U (US20030220297A1-20031127-C00074.png) 1989-01-20

Family

ID=31337293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10503687U Pending JPS6411541U (US20030220297A1-20031127-C00074.png) 1987-07-07 1987-07-07

Country Status (1)

Country Link
JP (1) JPS6411541U (US20030220297A1-20031127-C00074.png)

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