JPS6411540U - - Google Patents
Info
- Publication number
- JPS6411540U JPS6411540U JP10564587U JP10564587U JPS6411540U JP S6411540 U JPS6411540 U JP S6411540U JP 10564587 U JP10564587 U JP 10564587U JP 10564587 U JP10564587 U JP 10564587U JP S6411540 U JPS6411540 U JP S6411540U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- probe card
- support base
- fitting
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10564587U JPS6411540U (da) | 1987-07-08 | 1987-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10564587U JPS6411540U (da) | 1987-07-08 | 1987-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411540U true JPS6411540U (da) | 1989-01-20 |
Family
ID=31338443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10564587U Pending JPS6411540U (da) | 1987-07-08 | 1987-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411540U (da) |
-
1987
- 1987-07-08 JP JP10564587U patent/JPS6411540U/ja active Pending