JPS6411331U - - Google Patents
Info
- Publication number
- JPS6411331U JPS6411331U JP1987105832U JP10583287U JPS6411331U JP S6411331 U JPS6411331 U JP S6411331U JP 1987105832 U JP1987105832 U JP 1987105832U JP 10583287 U JP10583287 U JP 10583287U JP S6411331 U JPS6411331 U JP S6411331U
- Authority
- JP
- Japan
- Prior art keywords
- fluid pressure
- pressure detection
- port device
- fluid
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 3
Landscapes
- Measuring Fluid Pressure (AREA)
- Exhaust Silencers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987105832U JPS6411331U (me) | 1987-07-09 | 1987-07-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987105832U JPS6411331U (me) | 1987-07-09 | 1987-07-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6411331U true JPS6411331U (me) | 1989-01-20 |
Family
ID=31338801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987105832U Pending JPS6411331U (me) | 1987-07-09 | 1987-07-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6411331U (me) |
-
1987
- 1987-07-09 JP JP1987105832U patent/JPS6411331U/ja active Pending