JPS6410666U - - Google Patents

Info

Publication number
JPS6410666U
JPS6410666U JP10610987U JP10610987U JPS6410666U JP S6410666 U JPS6410666 U JP S6410666U JP 10610987 U JP10610987 U JP 10610987U JP 10610987 U JP10610987 U JP 10610987U JP S6410666 U JPS6410666 U JP S6410666U
Authority
JP
Japan
Prior art keywords
weight
flexible portion
viscous fluid
hole
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10610987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10610987U priority Critical patent/JPS6410666U/ja
Publication of JPS6410666U publication Critical patent/JPS6410666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP10610987U 1987-07-10 1987-07-10 Pending JPS6410666U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10610987U JPS6410666U (US07534539-20090519-C00280.png) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10610987U JPS6410666U (US07534539-20090519-C00280.png) 1987-07-10 1987-07-10

Publications (1)

Publication Number Publication Date
JPS6410666U true JPS6410666U (US07534539-20090519-C00280.png) 1989-01-20

Family

ID=31339325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10610987U Pending JPS6410666U (US07534539-20090519-C00280.png) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPS6410666U (US07534539-20090519-C00280.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004286652A (ja) * 2003-03-24 2004-10-14 Denso Corp 加速度センサ
US7538363B2 (en) 2006-05-29 2009-05-26 Panasonic Corporation Solid-state imaging device and method for fabricating the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004286652A (ja) * 2003-03-24 2004-10-14 Denso Corp 加速度センサ
US7538363B2 (en) 2006-05-29 2009-05-26 Panasonic Corporation Solid-state imaging device and method for fabricating the same

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